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Controlled sealing of nanopores using an easily fabricated silicon platform combining in situ optical and electrical monitoring

1 Aug 2015Microelectronic Engineering

DOI : 10.1016/j.mee.2015.03.032

Authors

Raphaël Marchand, Franck Carcenac, Laurent Malaquin, Emmanuelle Trévisiol, Christophe Vieu, Christophe Thibault